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Inventor
SAMPURNO YASA
US
2 patents
⚠️ This page may combine multiple inventors who share the name “SAMPURNO YASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BORUCKI LEONARD
1 patent
US8197306B2
Jun 12, 2012
Method and device for the injection of CMP slurry
BORUCKI LEONARD
7 citations
70
ARACA INC
1 patent
US12448545B2
Oct 21, 2025
Silicon carbide (SIC) wafer polishing with slurry formulation and process
ARACA INC
0 citations
46