Inventor
WEI GANG
CN51 patents
⚠️ This page may combine multiple inventors who share the name “WEI GANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD
21 patentsUS11615942B2Mar 28, 2023
Control method of radiofrequency source
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD4 citations73
US10886105B2Jan 5, 2021
Impedance matching method, impedance matching device and plasma generating apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD3 citations73
US10699881B2Jun 30, 2020
Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD6 citations69
US10854482B2Dec 1, 2020
Reaction chamber and plasma processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations63
US11114281B2Sep 7, 2021
Method and device for radio frequency impedance matching, and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations62
US11189465B2Nov 30, 2021
Adjustable capacitor, impedance matching device and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations60
US11410833B2Aug 9, 2022
Lower electrode mechanism and reaction chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations59
US11626268B2Apr 11, 2023
Induction coil assembly and reaction chamber
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations58
US11955313B2Apr 9, 2024
Control circuit, pulsed power supply system, and semiconductor processing equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations52
US11749502B2Sep 5, 2023
System and method for pulse modulation of radio frequency power supply and reaction chamber thereof
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations52
US12300460B2May 13, 2025
Power adjustment method of upper electrode power supply and semiconductor process apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations51
US11056316B2Jul 6, 2021
Radio frequency pulse matching method and device thereof and pulsing plasma generation system
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50
US10879866B2Dec 29, 2020
Filter circuit, heating circuit, and semiconductor processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50
US12191114B2Jan 7, 2025
Semiconductor reaction chamber and atomic layer plasma etching apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations49
US10170285B2Jan 1, 2019
Method of operating semiconductor manufacturing apparatus and semiconductor devices
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations48
US9899194B2Feb 20, 2018
Apparatus for plasma treatment and method of operating the apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations48
US12412731B2Sep 9, 2025
Coil structure and plasma processing apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47
US12387906B2Aug 12, 2025
Coil structure for generating plasma and semiconductor equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47
US12261022B2Mar 25, 2025
Semiconductor process apparatus and plasma ignition method
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations46
US12266507B2Apr 1, 2025
Impedance-matching method, impedance-matching device, and semiconductor process apparatus
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations45
US12394593B2Aug 19, 2025
Power control method and device of lower radio frequency power supply and semiconductor processing equipment
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations43
UNIV ZHEJIANG CITY COLLEGE
3 patentsUS11828037B1Nov 28, 2023
Pullout resistance measuring device and method based on anchor plate foundation of submarine slope site
UNIV ZHEJIANG CITY COLLEGE4 citations65
US11796425B1Oct 24, 2023
Measurement method for pullout force measurement test device based on anchor group effect of marine pipeline
UNIV ZHEJIANG CITY COLLEGE0 citations47
US11459723B2Oct 4, 2022
Anchor rod for positioned grouting suitable for prevention and control of engineering seepage damage and construction method thereof
UNIV ZHEJIANG CITY COLLEGE0 citations46
WEI GANG
3 patentsHANGZHOU CITY UNIV
3 patentsUS11988093B2May 21, 2024
Inflatable folding tunnel reinforcement structure and construction method thereof
HANGZHOU CITY UNIV0 citations43
US11733128B1Aug 22, 2023
Test device and method for studying influence of external load on soil arching effect of shield tunnel
HANGZHOU CITY UNIV0 citations42
US11952728B2Apr 9, 2024
Road structure reconstructed from large-scale independent underground garage and construction method thereof
HANGZHOU CITY UNIV0 citations41
HONGFUJIN PREC IND SHENZHEN
2 patentsUNIV FUDAN
2 patentsKONINKL PHILIPS ELECTRONICS NV
1 patentLAPORTE WATER TECHNOLOGIES & B
1 patentNINGBO SUNFREE MOTOR TECH COMPANY LIMITED
1 patentGUANGZHOU PHONPAD INFORMATION TECH COOPERATION LIMITED
1 patentIVIEW THERAPEUTICS INC
1 patentACCENTURE GLOBAL SERVICES LTD
1 patentHUAWEI TECH CO LTD
1 patentGUANGZHOU PHONPAD INFORMATION TECH CO LTD
1 patentHONEYWELL INT INC
1 patentGAN YONG
1 patentCHEN CHENG
1 patentUNIV SOUTHWEST PETROLEUM
1 patentCHEN PENG
1 patentSHAANXI MICROPRE MEDICAL BIOTECHNOLOGY CO LTD
1 patentAIRBUS SAS
1 patentFLIGHT INSPECTION CENTER OF CAAC
1 patentShowing the top 50 of 51 patents by PatentIndex Score.