P

Inventor

WEI GANG

CN51 patents
⚠️ This page may combine multiple inventors who share the name “WEI GANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD

21 patents
US11615942B2Mar 28, 2023

Control method of radiofrequency source

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD4 citations73
US10886105B2Jan 5, 2021

Impedance matching method, impedance matching device and plasma generating apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD3 citations73
US10699881B2Jun 30, 2020

Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD6 citations69
US10854482B2Dec 1, 2020

Reaction chamber and plasma processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD2 citations63
US11114281B2Sep 7, 2021

Method and device for radio frequency impedance matching, and semiconductor processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations62
US11189465B2Nov 30, 2021

Adjustable capacitor, impedance matching device and semiconductor processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations60
US11410833B2Aug 9, 2022

Lower electrode mechanism and reaction chamber

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD1 citations59
US11626268B2Apr 11, 2023

Induction coil assembly and reaction chamber

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations58
US11955313B2Apr 9, 2024

Control circuit, pulsed power supply system, and semiconductor processing equipment

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations52
US11749502B2Sep 5, 2023

System and method for pulse modulation of radio frequency power supply and reaction chamber thereof

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations52
US12300460B2May 13, 2025

Power adjustment method of upper electrode power supply and semiconductor process apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations51
US11056316B2Jul 6, 2021

Radio frequency pulse matching method and device thereof and pulsing plasma generation system

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50
US10879866B2Dec 29, 2020

Filter circuit, heating circuit, and semiconductor processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations50
US12191114B2Jan 7, 2025

Semiconductor reaction chamber and atomic layer plasma etching apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations49
US10170285B2Jan 1, 2019

Method of operating semiconductor manufacturing apparatus and semiconductor devices

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations48
US9899194B2Feb 20, 2018

Apparatus for plasma treatment and method of operating the apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations48
US12412731B2Sep 9, 2025

Coil structure and plasma processing apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47
US12387906B2Aug 12, 2025

Coil structure for generating plasma and semiconductor equipment

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations47
US12261022B2Mar 25, 2025

Semiconductor process apparatus and plasma ignition method

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations46
US12266507B2Apr 1, 2025

Impedance-matching method, impedance-matching device, and semiconductor process apparatus

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations45
US12394593B2Aug 19, 2025

Power control method and device of lower radio frequency power supply and semiconductor processing equipment

BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD0 citations43

UNIV ZHEJIANG CITY COLLEGE

3 patents

WEI GANG

3 patents

HANGZHOU CITY UNIV

3 patents

HONGFUJIN PREC IND SHENZHEN

2 patents

UNIV FUDAN

2 patents

KONINKL PHILIPS ELECTRONICS NV

1 patent

LAPORTE WATER TECHNOLOGIES & B

1 patent

NINGBO SUNFREE MOTOR TECH COMPANY LIMITED

1 patent

GUANGZHOU PHONPAD INFORMATION TECH COOPERATION LIMITED

1 patent

IVIEW THERAPEUTICS INC

1 patent

ACCENTURE GLOBAL SERVICES LTD

1 patent

HUAWEI TECH CO LTD

1 patent

GUANGZHOU PHONPAD INFORMATION TECH CO LTD

1 patent

HONEYWELL INT INC

1 patent

GAN YONG

1 patent

CHEN CHENG

1 patent

UNIV SOUTHWEST PETROLEUM

1 patent

CHEN PENG

1 patent

SHAANXI MICROPRE MEDICAL BIOTECHNOLOGY CO LTD

1 patent

AIRBUS SAS

1 patent

FLIGHT INSPECTION CENTER OF CAAC

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.