Inventor
HALLEY DAVID G
US32 patents
⚠️ This page may combine multiple inventors who share the name “HALLEY DAVID G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
STRASBAUGH
23 patentsUS6551179B1Apr 22, 2003
Hard polishing pad for chemical mechanical planarization
STRASBAUGH80 citations98
US6520843B1Feb 18, 2003
High planarity chemical mechanical planarization
STRASBAUGH111 citations98
US6855030B2Feb 15, 2005
Modular method for chemical mechanical planarization
STRASBAUGH20 citations92
US6692339B1Feb 17, 2004
Combined chemical mechanical planarization and cleaning
STRASBAUGH21 citations92
US6629874B1Oct 7, 2003
Feature height measurement during CMP
STRASBAUGH37 citations92
US6602121B1Aug 5, 2003
Pad support apparatus for chemical mechanical planarization
STRASBAUGH31 citations92
US6547651B1Apr 15, 2003
Subaperture chemical mechanical planarization with polishing pad conditioning
STRASBAUGH26 citations92
US6517419B1Feb 11, 2003
Shaping polishing pad for small head chemical mechanical planarization
STRASBAUGH21 citations92
US6514129B1Feb 4, 2003
Multi-action chemical mechanical planarization device and method
STRASBAUGH21 citations92
US6511368B1Jan 28, 2003
Spherical drive assembly for chemical mechanical planarization
STRASBAUGH22 citations92
US6464574B1Oct 15, 2002
Pad quick release device for chemical mechanical planarization
STRASBAUGH20 citations92
US6346036B1Feb 12, 2002
Multi-pad apparatus for chemical mechanical planarization
STRASBAUGH34 citations92
US6227956B1May 8, 2001
Pad quick release device for chemical mechanical polishing
STRASBAUGH30 citations92
US6976901B1Dec 20, 2005
In situ feature height measurement
STRASBAUGH21 citations90
US6739945B2May 25, 2004
Polishing pad with built-in optical sensor
STRASBAUGH19 citations89
US6885206B2Apr 26, 2005
Device for supporting thin semiconductor wafers
STRASBAUGH15 citations84
US6527621B1Mar 4, 2003
Pad retrieval apparatus for chemical mechanical planarization
STRASBAUGH18 citations84
US6945856B2Sep 20, 2005
Subaperture chemical mechanical planarization with polishing pad conditioning
STRASBAUGH6 citations74
US6887133B1May 3, 2005
Pad support method for chemical mechanical planarization
STRASBAUGH9 citations74
US6514121B1Feb 4, 2003
Polishing chemical delivery for small head chemical mechanical planarization
STRASBAUGH12 citations74
US6495463B2Dec 17, 2002
Method for chemical mechanical polishing
STRASBAUGH9 citations74
US6450860B1Sep 17, 2002
Pad transfer apparatus for chemical mechanical planarization
STRASBAUGH6 citations63
US6986701B2Jan 17, 2006
Polishing pad with built-in optical sensor
STRASBAUGH4 citations59
WEYERHAEUSER CO
4 patentsUS4900377AFeb 13, 1990
Method of making a limited life pad
WEYERHAEUSER CO83 citations94
US4848607AJul 18, 1989
Classifier
WEYERHAEUSER CO22 citations82
US4141390AFeb 27, 1979
Optical electronic seed sowing system
WEYERHAEUSER CO21 citations78
US4969351ANov 13, 1990
Apparatus for determining drainage time of papermaking stock
WEYERHAEUSER CO2 citations61