Inventor
HAYAMA TAKAFUMI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HAYAMA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS8356951B2Jan 22, 2013
Wet-processing apparatus
TOKYO ELECTRON LTD5 citations70
US12244972B2Mar 4, 2025
Substrate processing monitoring apparatus based on imaging video data, substrate processing apparatus, substrate processing monitoring method, and storage medium
TOKYO ELECTRON LTD0 citations55
US11914298B2Feb 27, 2024
Liquid processing apparatus and method of detecting liquid in liquid processing apparatus
TOKYO ELECTRON LTD0 citations46
US10248030B2Apr 2, 2019
Process recipe evaluation method, storage medium, assisting device for process recipe evaluation, and liquid processing apparatus
TOKYO ELECTRON LTD0 citations38
SHARP KK
3 patentsUS5825196AOct 20, 1998
Method for detecting defects in an active matrix liquid crystal display panel
SHARP KK24 citations89
US5734450AMar 31, 1998
Active-matrix substrate and a defect correcting method thereof
SHARP KK38 citations89
US5786707AJul 28, 1998
Method of detecting possible defect of liquid crystal panel
SHARP KK7 citations72