Inventor
COTE DONNA R
US11 patents
Patents
11 patentsUS6635506B2Oct 21, 2003
Method of fabricating micro-electromechanical switches on CMOS compatible substrates
IBM155 citations98
US5166096ANov 24, 1992
Process for fabricating self-aligned contact studs for semiconductor structures
IBM431 citations98
US5216282AJun 1, 1993
Self-aligned contact studs for semiconductor structures
IBM62 citations96
US6252295B1Jun 26, 2001
Adhesion of silicon carbide films
IBM67 citations95
US6077786AJun 20, 2000
Methods and apparatus for filling high aspect ratio structures with silicate glass
IBM57 citations95
US6798029B2Sep 28, 2004
Method of fabricating micro-electromechanical switches on CMOS compatible substrates
IBM28 citations92
US5217567AJun 8, 1993
Selective etching process for boron nitride films
IBM25 citations92
US5187121AFeb 16, 1993
Process for fabrication of a semiconductor structure and contact stud
IBM27 citations92
US6274440B1Aug 14, 2001
Manufacturing of cavity fuses on gate conductor level
IBM39 citations91
US7456420B2Nov 25, 2008
Electrode for phase change memory device and method
IBM12 citations79
US5352927AOct 4, 1994
Self-aligned contact studs for semiconductor structures
IBM10 citations73