Inventor

DWORKIN LARRY A

US2 patents

Patents

2 patents

US6656837B2Dec 2, 2003

Method of eliminating photoresist poisoning in damascene applications

APPLIED MATERIALS INC285 citations98

US7034409B2Apr 25, 2006

Method of eliminating photoresist poisoning in damascene applications

APPLIED MATERIALS INC5 citations72