Inventor

ENGELEN ADRIANUS FRANCISCUS PE

NL2 patents

Patents

2 patents

US6809797B2Oct 26, 2004

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV71 citations94

US7352435B2Apr 1, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV26 citations91