Inventor
VAN SCHOOT JAN BERNARD PLECHEL
NL5 patents
Patents
5 patentsUS6737662B2May 18, 2004
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product
ASML NETHERLANDS BV109 citations96
US7352435B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV26 citations91
US7177010B2Feb 13, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations61
US7374869B2May 20, 2008
Lithographic processing method and device manufactured thereby
ASML NETHERLANDS BV5 citations58
US7199861B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations42