Inventor
GOTOH YASUKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “GOTOH YASUKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6225011B1May 1, 2001
Method for manufacturing semiconductor devices utilizing plurality of exposure systems
HITACHI LTD38 citations92
US6703171B2Mar 9, 2004
Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method
HITACHI LTD13 citations84
US7561243B2Jul 14, 2009
Liquid crystal display device with spacers facing capacitive element
HITACHI LTD6 citations71
US7576828B2Aug 18, 2009
Liquid crystal display device with spacer facing capacitance electrode
HITACHI LTD4 citations60