Inventor
KOTAKE YUICHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “KOTAKE YUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON SALES CO INC
4 patentsUS6479409B2Nov 12, 2002
Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent
CANON SALES CO INC74 citations95
US6852651B2Feb 8, 2005
Semiconductor device and method of manufacturing the same
CANON SALES CO INC23 citations92
US6645883B2Nov 11, 2003
Film forming method, semiconductor device and manufacturing method of the same
CANON SALES CO INC24 citations92
US6642157B2Nov 4, 2003
Film forming method and semiconductor device
CANON SALES CO INC33 citations92