Inventor
KALLER JULIAN
DE17 patents
⚠️ This page may combine multiple inventors who share the name “KALLER JULIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
11 patentsUS8870396B2Oct 28, 2014
Substrates for mirrors for EUV lithography and their production
ZEISS CARL SMT GMBH5 citations72
US10509336B2Dec 17, 2019
Optical assembly having a thermally conductive component
ZEISS CARL SMT GMBH2 citations70
US11194119B2Dec 7, 2021
Optical assembly having a thermally conductive component
ZEISS CARL SMT GMBH0 citations60
US10281824B2May 7, 2019
Microlithography projection objective
ZEISS CARL SMT GMBH0 citations51
US9097984B2Aug 4, 2015
Microlithography projection objective
ZEISS CARL SMT GMBH1 citations51
US10203607B2Feb 12, 2019
Optical element unit for exposure processes
ZEISS CARL SMT GMBH0 citations50
US12405108B2Sep 2, 2025
Production method and measurement method
ZEISS CARL SMT GMBH0 citations48
US9703098B2Jul 11, 2017
Lens module comprising at least one exchangeable optical element
ZEISS CARL SMT GMBH0 citations48
US9423695B2Aug 23, 2016
Lens module comprising at least one exchangeable optical element
ZEISS CARL SMT GMBH0 citations48
US8939587B2Jan 27, 2015
Lens module comprising at least one exchangeable optical element
ZEISS CARL SMT GMBH0 citations48
US8376559B2Feb 19, 2013
Lens module comprising at least one exchangeable optical element
ZEISS CARL SMT GMBH0 citations48
ZEISS CARL SMT AG
3 patentsUS7659976B2Feb 9, 2010
Devices and methods for inspecting optical elements with a view to contamination
ZEISS CARL SMT AG2 citations61
US7443500B2Oct 28, 2008
Apparatus for scattered light inspection of optical elements
ZEISS CARL SMT AG1 citations50
US7545483B2Jun 9, 2009
Optical element unit for exposure processes
ZEISS CARL SMT AG0 citations49