Inventor
CHARD JEFFREY ALEXANDER
US5 patents
Patents
5 patentsUS7783669B2Aug 24, 2010
Data flow management in generating profile models used in optical metrology
TOKYO ELECTRON LTD11 citations82
US7667858B2Feb 23, 2010
Automated process control using optical metrology and a correlation between profile models and key profile shape variables
TOKYO ELECTRON LTD9 citations82
US7596422B2Sep 29, 2009
Determining one or more profile parameters of a structure using optical metrology and a correlation between profile models and key profile shape variables
TOKYO ELECTRON LTD5 citations60
US7515283B2Apr 7, 2009
Parallel profile determination in optical metrology
TOKYO ELECTRON LTD0 citations48
US7765234B2Jul 27, 2010
Data flow management in generating different signal formats used in optical metrology
TOKYO ELECTRON LTD0 citations40