Inventor
NAKASOGI TERUHIRO
JP5 patents
Patents
5 patentsUS5294257AMar 15, 1994
Edge masking spin tool
IBM82 citations93
US6825125B2Nov 30, 2004
Thin-film-transistor-array substrate, thin-film-transistor-array fabrication method, and display device
IBM8 citations71
US6734937B2May 11, 2004
FCB-type vertically aligned liquid crystal device
IBM8 citations69
US5818563AOct 6, 1998
Substrate structure and assembly method for reduced spatial light modulator size
IBM6 citations62
US6862064B2Mar 1, 2005
Liquid crystal device, fabricating method, and fabricating apparatus thereof
IBM0 citations48