Inventor
NARISHIGE KAZUKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “NARISHIGE KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS9384992B2Jul 5, 2016
Plasma processing method
TOKYO ELECTRON LTD45 citations94
US9412617B2Aug 9, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD14 citations84
US9355861B2May 31, 2016
Semiconductor device manufacturing method and computer-readable storage medium
TOKYO ELECTRON LTD3 citations73
US9337056B2May 10, 2016
Semiconductor device manufacturing method
TOKYO ELECTRON LTD4 citations68
US11501976B2Nov 15, 2022
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD2 citations66
US9449838B2Sep 20, 2016
Semiconductor device manufacturing method
TOKYO ELECTRON LTD2 citations61
US7622393B2Nov 24, 2009
Method and apparatus for manufacturing a semiconductor device, control program thereof and computer-readable storage medium storing the control program
TOKYO ELECTRON LTD2 citations61
US9039913B2May 26, 2015
Semiconductor device manufacturing method
TOKYO ELECTRON LTD0 citations51