Inventor
MATSUNAGA SOICHIRO
JP8 patents
Patents
8 patentsUS10903037B2Jan 26, 2021
Charged particle beam device
HITACHI HIGH TECH CORP2 citations72
US11227740B2Jan 18, 2022
Electron gun and electron beam application device
HITACHI HIGH TECH CORP0 citations62
US12456597B2Oct 28, 2025
Energy filter, and energy analyzer and charged particle beam device provided with same
HITACHI HIGH TECH CORP0 citations61
US11508544B2Nov 22, 2022
Thermoelectric field emission electron source and electron beam application device
HITACHI HIGH TECH CORP0 citations60
US11322329B2May 3, 2022
Electron source, method for manufacturing the same, and electron beam device using the same
HITACHI HIGH TECH CORP0 citations60
US12394585B2Aug 19, 2025
Electron source, electron gun, and charged particle beam device
HITACHI HIGH TECH CORP0 citations59
US11894211B2Feb 6, 2024
Electron beam apparatus and method for controlling electron beam apparatus
HITACHI HIGH TECH CORP0 citations58
US9006654B2Apr 14, 2015
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations50