P

Inventor

ISHIMURA HIROAKI

JP8 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMURA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

3 patents
US9099349B2Aug 4, 2015

Semiconductor device manufacturing method

HITACHI HIGH TECH CORP8 citations83
US7224568B2May 29, 2007

Plasma processing method and plasma processing apparatus

HITACHI HIGH TECH CORP12 citations83
US6709984B2Mar 23, 2004

Method for manufacturing semiconductor device

HITACHI HIGH TECH CORP9 citations69

HITACHI LTD

2 patents
US6617255B2Sep 9, 2003

Plasma processing method for working the surface of semiconductor devices

HITACHI LTD7 citations72
US7098138B2Aug 29, 2006

Plasma processing method for working the surface of semiconductor devices

HITACHI LTD2 citations61

INOUE YOSHIHARU

1 patent
US8207066B2Jun 26, 2012

Dry etching method

INOUE YOSHIHARU6 citations70

ITO TORU

1 patent
US9018075B2Apr 28, 2015

Plasma processing method

ITO TORU1 citations46

OHMORI TAKESHI

1 patent
US8486291B2Jul 16, 2013

Plasma processing method

OHMORI TAKESHI0 citations44