Inventor
CHOI DONGSUB
KR16 patents
⚠️ This page may combine multiple inventors who share the name “CHOI DONGSUB”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
7 patentsUS10649447B2May 12, 2020
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
KLA TENCOR CORP2 citations72
US10303835B2May 28, 2019
Method and apparatus for direct self assembly in target design and production
KLA TENCOR CORP2 citations72
US10409171B2Sep 10, 2019
Overlay control with non-zero offset prediction
KLA TENCOR CORP3 citations71
US9476838B2Oct 25, 2016
Hybrid imaging and scatterometry targets
KLA TENCOR CORP5 citations71
US10095121B2Oct 9, 2018
Optimizing the utilization of metrology tools
KLA TENCOR CORP5 citations69
US9466100B2Oct 11, 2016
Focus monitoring method using asymmetry embedded imaging target
KLA TENCOR CORP2 citations56
US10725385B2Jul 28, 2020
Optimizing the utilization of metrology tools
KLA TENCOR CORP0 citations48
CHOI DONGSUB
4 patentsUS10295993B2May 21, 2019
Method and system for detecting and correcting problematic advanced process control parameters
CHOI DONGSUB14 citations83
US9709903B2Jul 18, 2017
Overlay target geometry for measuring multiple pitches
CHOI DONGSUB15 citations82
US8804137B2Aug 12, 2014
Unique mark and method to determine critical dimension uniformity and registration of reticles combined with wafer overlay capability
CHOI DONGSUB4 citations71
US8655469B2Feb 18, 2014
Advanced process control optimization
CHOI DONGSUB4 citations71
IZIKSON PAVEL
2 patentsUS8175831B2May 8, 2012
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
IZIKSON PAVEL42 citations95
US9651943B2May 16, 2017
Methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers
IZIKSON PAVEL1 citations60