P

Inventor

LAM HYMAN

US5 patents
⚠️ This page may combine multiple inventors who share the name “LAM HYMAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
USRE47440EJun 18, 2019

Apparatus and method for providing uniform flow of gas

APPLIED MATERIALS INC360 citations98
US9252024B2Feb 2, 2016

Deposition chambers with UV treatment and methods of use

APPLIED MATERIALS INC469 citations98
US9109754B2Aug 18, 2015

Apparatus and method for providing uniform flow of gas

APPLIED MATERIALS INC4 citations73

LAM HYMAN

1 patent
US8291857B2Oct 23, 2012

Apparatuses and methods for atomic layer deposition

LAM HYMAN375 citations96

WU DIEN-YEH

1 patent
US9447497B2Sep 20, 2016

Processing chamber gas delivery system with hot-swappable ampoule

WU DIEN-YEH5 citations63