Inventor
YANG LI-PO
TW7 patents
Patents
7 patentsUS12189287B2Jan 7, 2025
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11714355B2Aug 1, 2023
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11550220B2Jan 10, 2023
Negative tone photoresist for EUV lithography
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12566374B2Mar 3, 2026
Photoresist composition and method of manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10312108B2Jun 4, 2019
Method for forming semiconductor structure using modified resist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US12510821B2Dec 30, 2025
Photoresist composition and method of forming photoresist pattern
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10879078B2Dec 29, 2020
Method of patterning resist layer and method of forming semiconductor structure using patterned resist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40