Inventor
SUH JISOO
JP5 patents
Patents
5 patentsUS11521886B2Dec 6, 2022
Substrate processing apparatus and substrate support
TOKYO ELECTRON LTD0 citations59
US10825709B2Nov 3, 2020
Electrostatic chucking method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations48
US10269607B2Apr 23, 2019
Electrostatic chucking method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations48
US10755902B2Aug 25, 2020
Plasma processing apparatus and focus ring
TOKYO ELECTRON LTD0 citations38
US10103011B2Oct 16, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38