Inventor
KO KYUNGSEOK
KR5 patents
Patents
5 patentsUS10964530B2Mar 30, 2021
Method of forming blocking silicon oxide film, and storage medium
TOKYO ELECTRON LTD1 citations60
US10553686B2Feb 4, 2020
Method and apparatus for forming silicon oxide film, and storage medium
TOKYO ELECTRON LTD1 citations59
US10781515B2Sep 22, 2020
Film-forming method and film-forming apparatus
TOKYO ELECTRON LTD0 citations49
US10636649B2Apr 28, 2020
Method and apparatus for forming silicon oxide film on tungsten film
TOKYO ELECTRON LTD0 citations49
US10968515B2Apr 6, 2021
Vertical heat treatment apparatus
TOKYO ELECTRON LTD0 citations46