Inventor
JOO WON-DON
KR9 patents
Patents
9 patentsUS10670968B2Jun 2, 2020
Maskless exposure method, maskless exposure apparatus and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations72
US8841824B2Sep 23, 2014
Broadband light illuminators
SAMSUNG ELECTRONICS CO LTD5 citations71
US11047901B2Jun 29, 2021
Method of testing an interconnection substrate and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US9425036B2Aug 23, 2016
Light source device and semiconductor manufacturing apparatus including the same
SAMSUNG ELECTRONICS CO LTD2 citations59
US10816480B2Oct 27, 2020
Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD1 citations57
US10910202B2Feb 2, 2021
Plasma sensing device, plasma monitoring system and method of controlling plasma processes
SAMSUNG ELECTRONICS CO LTD0 citations50
US9255694B2Feb 9, 2016
Reflector structure of illumination optic system
SAMSUNG ELECTRONICS CO LTD0 citations50
US9839110B2Dec 5, 2017
Plasma light source apparatus and light source system including the same
SAMSUNG ELECTRONICS CO LTD1 citations48
US9891537B2Feb 13, 2018
Maskless lithographic apparatus measuring accumulated amount of light
SAMSUNG ELECTRONICS CO LTD0 citations30