Inventor
CONKLIN DAVID
US8 patents
⚠️ This page may combine multiple inventors who share the name “CONKLIN DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS12541155B2Feb 3, 2026
Coaxial see-through inspection system
TOKYO ELECTRON LTD0 citations60
US12512356B2Dec 30, 2025
Apparatus and method for wafer alignment
TOKYO ELECTRON LTD0 citations60
US11526088B2Dec 13, 2022
Coaxial see-through alignment imaging system
TOKYO ELECTRON LTD0 citations60
US12564027B2Feb 24, 2026
Top-down self-alignment of vias in a semiconductor device for sub-22NM pitch metals
TOKYO ELECTRON LTD0 citations51
US12381118B2Aug 5, 2025
3D multiple location compressing bonded arm for advanced integration
TOKYO ELECTRON LTD0 citations50
US12411412B2Sep 9, 2025
Patterning semiconductor features
TOKYO ELECTRON LTD0 citations49
US12543542B2Feb 3, 2026
Patterning method using secondary resist surface functionalization for mask formation
TOKYO ELECTRON LTD0 citations48