Inventor
MARANGONI TOMAS
US3 patents
Patents
3 patentsUS11829069B2Nov 28, 2023
Photoresist compositions and methods
ROHM & HAAS ELECT MAT1 citations59
US11809077B2Nov 7, 2023
Photoresist compositions and pattern formation methods
ROHM & HAAS ELECT MAT0 citations48
US11852972B2Dec 26, 2023
Photoresist compositions and pattern formation methods
ROHM & HAAS ELECT MAT0 citations46