Inventor
Choy Martin Yue
US8 patents
Patents
8 patentsUS10504754B2Dec 10, 2019
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC16 citations92
US11276559B2Mar 15, 2022
Semiconductor processing chamber for multiple precursor flow
APPLIED MATERIALS INC3 citations72
US10522371B2Dec 31, 2019
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC2 citations71
US11915950B2Feb 27, 2024
Multi-zone semiconductor substrate supports
APPLIED MATERIALS INC1 citations61
US11735441B2Aug 22, 2023
Systems and methods for improved semiconductor etching and component protection
APPLIED MATERIALS INC0 citations61
US11361939B2Jun 14, 2022
Semiconductor processing chamber for multiple precursor flow
APPLIED MATERIALS INC1 citations61
US11276590B2Mar 15, 2022
Multi-zone semiconductor substrate supports
APPLIED MATERIALS INC1 citations61
US12002659B2Jun 4, 2024
Apparatus for generating etchants for remote plasma processes
APPLIED MATERIALS INC0 citations39