Inventor

TANIFUJI TAMOTSU

JP8 patents

⚠️ This page may combine multiple inventors who share the name “TANIFUJI TAMOTSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

4 patents

US5829939ANov 3, 1998

INOUE YUYA

3 patents

US8783674B2Jul 22, 2014

Stage

INOUE YUYA4 citations69

US8485507B2Jul 16, 2013

Movable table and processing stage

INOUE YUYA6 citations69

US8827254B2Sep 9, 2014

Substrate transfer processing apparatus

INOUE YUYA0 citations37

(unassigned)

1 patent

US6419482B1Jul 16, 2002

Opening and closing apparatus of an opening and closing lid of a box accommodating an object to be processed and a processing system of an object to be processed

39 citations92