Inventor
COONEY III EDWARD CRANDAL
US6 patents
⚠️ This page may combine multiple inventors who share the name “COONEY III EDWARD CRANDAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6339258B1Jan 15, 2002
Low resistivity tantalum
IBM27 citations91
US7863180B2Jan 4, 2011
Through substrate via including variable sidewall profile
IBM2 citations56
US8052799B2Nov 8, 2011
By-product collecting processes for cleaning processes
IBM5 citations55
US7517802B2Apr 14, 2009
Method for reducing foreign material concentrations in etch chambers
IBM1 citations50
US7192874B2Mar 20, 2007
Method for reducing foreign material concentrations in etch chambers
IBM1 citations50