Inventor
MORALES CARMEN
US10 patents
Patents
10 patentsUS6594024B1Jul 15, 2003
Monitor CMP process using scatterometry
ADVANCED MICRO DEVICES INC103 citations98
US7080330B1Jul 18, 2006
Concurrent measurement of critical dimension and overlay in semiconductor manufacturing
ADVANCED MICRO DEVICES INC79 citations97
US6459945B1Oct 1, 2002
System and method for facilitating determining suitable material layer thickness in a semiconductor device fabrication process
ADVANCED MICRO DEVICES INC22 citations92
US6093973AJul 25, 2000
Hard mask for metal patterning
ADVANCED MICRO DEVICES INC30 citations92
US6066578AMay 23, 2000
Method and system for providing inorganic vapor surface treatment for photoresist adhesion promotion
ADVANCED MICRO DEVICES INC20 citations92
US6597463B1Jul 22, 2003
System to determine suitability of sion arc surface for DUV resist patterning
ADVANCED MICRO DEVICES INC31 citations89
US6515342B1Feb 4, 2003
Method and system for providing inorganic vapor surface treatment for photoresist adhesion promotion
ADVANCED MICRO DEVICES INC6 citations74
US6429141B1Aug 6, 2002
Method of manufacturing a semiconductor device with improved line width accuracy
ADVANCED MICRO DEVICES INC7 citations73
US6383947B1May 7, 2002
Anti-reflective coating used in the fabrication of microcircuit structures in 0.18 micron and smaller technologies
ADVANCED MICRO DEVICES INC6 citations73
US6165855ADec 26, 2000
Antireflective coating used in the fabrication of microcircuit structures in 0.18 micron and smaller technologies
ADVANCED MICRO DEVICES INC13 citations73