Inventor
JOSLYN MICHAEL J
US13 patents
Patents
13 patentsUS6203404B1Mar 20, 2001
Chemical mechanical polishing methods
MICRON TECHNOLOGY INC136 citations98
US6592443B1Jul 15, 2003
Method and apparatus for forming and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
MICRON TECHNOLOGY INC85 citations97
US6533893B2Mar 18, 2003
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids
MICRON TECHNOLOGY INC72 citations96
US6383934B1May 7, 2002
Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids
MICRON TECHNOLOGY INC73 citations96
US6722943B2Apr 20, 2004
Planarizing machines and methods for dispensing planarizing solutions in the processing of microelectronic workpieces
MICRON TECHNOLOGY INC48 citations95
US7192336B2Mar 20, 2007
Method and apparatus for forming and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
MICRON TECHNOLOGY INC19 citations92
US6605159B2Aug 12, 2003
Device and method for collecting and measuring chemical samples on pad surface in CMP
MICRON TECHNOLOGY INC17 citations92
US6475071B1Nov 5, 2002
Cross flow slurry filtration apparatus and method
MICRON TECHNOLOGY INC37 citations92
US6837942B2Jan 4, 2005
Device and method for collecting and measuring chemical samples pad surface in CMP
MICRON TECHNOLOGY INC5 citations73
US6595832B2Jul 22, 2003
Chemical mechanical polishing methods
MICRON TECHNOLOGY INC5 citations73
US7210989B2May 1, 2007
Planarizing machines and methods for dispensing planarizing solutions in the processing of microelectronic workpieces
MICRON TECHNOLOGY INC2 citations62
US7223154B2May 29, 2007
Method for forming and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
MICRON TECHNOLOGY INC0 citations52
US6413834B1Jul 2, 2002
Methods for etching silicon dioxide; and methods for forming isolation regions
MICRON TECHNOLOGY INC0 citations51