Inventor
KERSCH ALFRED
DE12 patents
⚠️ This page may combine multiple inventors who share the name “KERSCH ALFRED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INFINEON TECHNOLOGIES AG
10 patentsUS6458603B1Oct 1, 2002
Method of fabricating a micro-technical structure, and micro-technical component
INFINEON TECHNOLOGIES AG104 citations97
US6524448B2Feb 25, 2003
Configuration for the execution of a plasma based sputter process
INFINEON TECHNOLOGIES AG35 citations90
US6413886B1Jul 2, 2002
Method for fabricating a microtechnical structure
INFINEON TECHNOLOGIES AG8 citations69
US7022209B2Apr 4, 2006
PVD method and PVD apparatus
INFINEON TECHNOLOGIES AG10 citations67
US7316933B2Jan 8, 2008
Method for producing an annular microstructure element
INFINEON TECHNOLOGIES AG2 citations62
US6977405B2Dec 20, 2005
Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it
INFINEON TECHNOLOGIES AG2 citations61
US6716748B2Apr 6, 2004
Reaction chamber for processing a substrate wafer, and method for processing a substrate using the chamber
INFINEON TECHNOLOGIES AG4 citations61
US6649521B2Nov 18, 2003
Method for determining the relevant ion and particle flows in i-PVD processes
INFINEON TECHNOLOGIES AG4 citations61
US6579758B2Jun 17, 2003
Method and installation for fabricating one-sided buried straps
INFINEON TECHNOLOGIES AG3 citations60
US6660637B2Dec 9, 2003
Process for chemical mechanical polishing
INFINEON TECHNOLOGIES AG4 citations59