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Inventor

BAYMAN ATIYE

US9 patents
⚠️ This page may combine multiple inventors who share the name “BAYMAN ATIYE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

5 patents
US6596654B1Jul 22, 2003

Gap fill for high aspect ratio structures

NOVELLUS SYSTEMS INC425 citations98
US7176039B1Feb 13, 2007

Dynamic modification of gap fill process characteristics

NOVELLUS SYSTEMS INC23 citations92
US7217658B1May 15, 2007

Process modulation to prevent structure erosion during gap fill

NOVELLUS SYSTEMS INC34 citations91
US6787483B1Sep 7, 2004

Gap fill for high aspect ratio structures

NOVELLUS SYSTEMS INC21 citations91
US7067440B1Jun 27, 2006

Gap fill for high aspect ratio structures

NOVELLUS SYSTEMS INC17 citations84

ADVANCED MICRO DEVICES INC

2 patents
US4468285AAug 28, 1984

Plasma etch process for single-crystal silicon with improved selectivity to silicon dioxide

ADVANCED MICRO DEVICES INC25 citations81
US4456501AJun 26, 1984

Process for dislocation-free slot isolations in device fabrication

ADVANCED MICRO DEVICES INC16 citations73

SYNERGY SEMICONDUCTOR CORP

2 patents
US5188971AFeb 23, 1993

Process for making a self-aligned bipolar sinker structure

SYNERGY SEMICONDUCTOR CORP8 citations68
US5001538AMar 19, 1991

Bipolar sinker structure and process for forming same

SYNERGY SEMICONDUCTOR CORP6 citations57