Inventor

CHAN TIN KWAN BOBBY

SG2 patents

Patents

2 patents

US7531979B2May 12, 2009

Direct drive robotic manipulator

ASM TECH SINGAPORE PTE LTD4 citations54

US7378616B2May 27, 2008

Heating apparatus and method for semiconductor devices

ASM TECH SINGAPORE PTE LTD0 citations38