Inventor
WATANABE TOMOHARU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE TOMOHARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
3 patentsUS6059921AMay 9, 2000
Chemical mechanical polishing apparatus and a polishing cloth for a chemical mechanical polishing apparatus
TOSHIBA KK10 citations73
US6276999B1Aug 21, 2001
Apparatus, backing plate, backing film and method for chemical mechanical polishing
TOSHIBA KK7 citations72
US6419558B2Jul 16, 2002
Apparatus, backing plate, backing film and method for chemical mechanical polishing
TOSHIBA KK4 citations61