P

Inventor

KUMAR KAUSHIK ARUN

US8 patents
⚠️ This page may combine multiple inventors who share the name “KUMAR KAUSHIK ARUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents
US7084479B2Aug 1, 2006

Line level air gaps

IBM27 citations90
US7253098B2Aug 7, 2007

Maintaining uniform CMP hard mask thickness

IBM13 citations82
US7358182B2Apr 15, 2008

Method of forming an interconnect structure

IBM11 citations78

RANJAN ALOK

3 patents
US8592327B2Nov 26, 2013

Formation of SiOCl-containing layer on exposed low-k surfaces to reduce low-k damage

RANJAN ALOK9 citations82
US8551877B2Oct 8, 2013

Sidewall and chamfer protection during hard mask removal for interconnect patterning

RANJAN ALOK12 citations82
US8809194B2Aug 19, 2014

Formation of SiOCl-containing layer on spacer sidewalls to prevent CD loss during spacer etch

RANJAN ALOK5 citations71

OHSAWA YUSUKE

1 patent
US8808562B2Aug 19, 2014

Dry metal etching method

OHSAWA YUSUKE3 citations55

PARK WAN-JAE

1 patent
US8058176B2Nov 15, 2011

Methods of patterning insulating layers using etching techniques that compensate for etch rate variations

PARK WAN-JAE3 citations47