Inventor
GRECO STEPHEN EDWARD
US10 patents
Patents
10 patentsUS6451712B1Sep 17, 2002
Method for forming a porous dielectric material layer in a semiconductor device and device formed
IBM123 citations99
US6140234AOct 31, 2000
Method to selectively fill recesses with conductive metal
IBM403 citations98
US6573606B2Jun 3, 2003
Chip to wiring interface with single metal alloy layer applied to surface of copper interconnect
IBM307 citations97
US5928960AJul 27, 1999
Process for reducing pattern factor effects in CMP planarization
IBM50 citations92
US6121129ASep 19, 2000
Method of contact structure formation
IBM24 citations88
US7300825B2Nov 27, 2007
Customizing back end of the line interconnects
IBM10 citations83
US7253098B2Aug 7, 2007
Maintaining uniform CMP hard mask thickness
IBM13 citations82
US7488679B2Feb 10, 2009
Interconnect structure and process of making the same
IBM13 citations79
US6831364B2Dec 14, 2004
Method for forming a porous dielectric material layer in a semiconductor device and device formed
IBM6 citations74
US7456501B1Nov 25, 2008
Semiconductor structure having recess with conductive metal
IBM4 citations62