Inventor

MARX WILLIAM F

US3 patents

⚠️ This page may combine multiple inventors who share the name “MARX WILLIAM F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

2 patents

US7355191B2Apr 8, 2008

Systems and methods for cleaning a chamber window of an EUV light source

CYMER INC20 citations90

US7732793B2Jun 8, 2010

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

CYMER INC14 citations82

PARTLO WILLIAM N

1 patent

US8075732B2Dec 13, 2011

EUV collector debris management

PARTLO WILLIAM N11 citations82