Inventor

HANSSON BJORN A M

SE5 patents

⚠️ This page may combine multiple inventors who share the name “HANSSON BJORN A M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CYMER INC

4 patents

US7109503B1Sep 19, 2006

Systems for protecting internal components of an EUV light source from plasma-generated debris

CYMER INC25 citations92

US7453077B2Nov 18, 2008

EUV light source

CYMER INC20 citations91

US7365351B2Apr 29, 2008

Systems for protecting internal components of a EUV light source from plasma-generated debris

CYMER INC14 citations91

US7732793B2Jun 8, 2010

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

CYMER INC14 citations82

HANSSON BJORN A M

1 patent

US9713239B2Jul 18, 2017

Laser produced plasma EUV light source

HANSSON BJORN A M0 citations44