Inventor
RICCI ANTHONY
US13 patents
⚠️ This page may combine multiple inventors who share the name “RICCI ANTHONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
7 patentsUS9779955B2Oct 3, 2017
Ion beam etching utilizing cryogenic wafer temperatures
LAM RES CORP21 citations94
US8587113B2Nov 19, 2013
Thermal plate with planar thermal zones for semiconductor processing
LAM RES CORP40 citations94
US7431788B2Oct 7, 2008
Method of protecting a bond layer in a substrate support adapted for use in a plasma processing system
LAM RES CORP36 citations90
US11289306B2Mar 29, 2022
Ion beam etching utilizing cryogenic wafer temperatures
LAM RES CORP2 citations73
US10879053B2Dec 29, 2020
Temperature controlled substrate support assembly
LAM RES CORP5 citations72
US10090211B2Oct 2, 2018
Edge seal for lower electrode assembly
LAM RES CORP2 citations71
US10892197B2Jan 12, 2021
Edge seal configurations for a lower electrode assembly
LAM RES CORP1 citations61