Inventor
VAN BILSEN FRANCISCUS BERNARDU
NL8 patents
⚠️ This page may combine multiple inventors who share the name “VAN BILSEN FRANCISCUS BERNARDU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
6 patentsUS7332732B2Feb 19, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV22 citations94
US7329888B2Feb 12, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV18 citations91
US7297971B2Nov 20, 2007
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV12 citations91
US7042552B1May 9, 2006
Alignment strategy optimization method
ASML NETHERLANDS BV33 citations91
US7414722B2Aug 19, 2008
Alignment measurement arrangement and alignment measurement method
ASML NETHERLANDS BV10 citations82
US7271907B2Sep 18, 2007
Lithographic apparatus with two-dimensional alignment measurement arrangement and two-dimensional alignment measurement method
ASML NETHERLANDS BV8 citations72