Inventor
VAN HAREN RICHARD JOHANNES FRA
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VAN HAREN RICHARD JOHANNES FRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7112813B2Sep 26, 2006
Device inspection method and apparatus using an asymmetric marker
ASML NETHERLANDS BV61 citations96
US7332732B2Feb 19, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV22 citations94
US7330261B2Feb 12, 2008
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
ASML NETHERLANDS BV19 citations91
US7329888B2Feb 12, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV18 citations91
US7297971B2Nov 20, 2007
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV12 citations91
US6858948B2Feb 22, 2005
Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations81
US7462548B2Dec 9, 2008
Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations72
US7056805B2Jun 6, 2006
Substrate provided with an alignment mark in a substantially transmissive process layer, mask for exposing said mark, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations51