Inventor
MEGENS HENRY
NL10 patents
⚠️ This page may combine multiple inventors who share the name “MEGENS HENRY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7880880B2Feb 1, 2011
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV24 citations95
US7332732B2Feb 19, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV22 citations94
US7330261B2Feb 12, 2008
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
ASML NETHERLANDS BV19 citations91
US7329888B2Feb 12, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV18 citations91
US7297971B2Nov 20, 2007
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV12 citations91
US7619738B2Nov 17, 2009
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
ASML NETHERLANDS BV4 citations72
US7439531B2Oct 21, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV7 citations71
US7453161B2Nov 18, 2008
Marker for alignment of non-transparent gate layer, method for manufacturing such a marker, and use of such a marker in a lithographic apparatus
ASML NETHERLANDS BV3 citations62