Inventor

TOLSMA HOITE PIETER THEODOOR

NL19 patents

⚠️ This page may combine multiple inventors who share the name “TOLSMA HOITE PIETER THEODOOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOLSMA HOITE PIETER THEODOOR

ASML NETHERLANDS BV

Alignment systems and methods for lithographic systems

Alignment systems and methods for lithographic systems

Alignment systems and methods for lithographic systems

Alignment systems and methods for lithographic systems

Alignment system and method and device manufactured thereby

Methods and apparatus for measuring a property of a substrate

Lithographic apparatus with alignment subsystem, device manufacturing method, and device manufactured thereby

Methods and apparatus for measuring a property of a substrate

Lithographic apparatus with alignment subsystem, device manufacturing method, using alignment, and alignment structure

Methods and apparatus for measuring a property of a substrate

Methods and apparatus for measuring a property of a substrate

Alignment systems and methods for lithographic systems

Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus

Methods and apparatus for measuring a property of a substrate

Method of characterization, method of characterizing a process operation, and device manufacturing method

Lithographic method

Lithographic method

VAN BILSEN FRANCISCUS BERNARDUS MARIA

Alignment systems and methods for lithographic systems

BIJNEN FRANCISCUS GODEFRIDUS CASPER

Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures