Inventor
SIMONS HUBERTUS JOHANNES GERTR
NL7 patents
Patents
7 patentsUS7332732B2Feb 19, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV22 citations94
US6844918B2Jan 18, 2005
Alignment system and methods for lithographic systems using at least two wavelengths
ASML NETHERLANDS BV54 citations94
US7329888B2Feb 12, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV18 citations91
US7297971B2Nov 20, 2007
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV12 citations91
US7259828B2Aug 21, 2007
Alignment system and method and device manufactured thereby
ASML NETHERLANDS BV25 citations86
US7468795B2Dec 23, 2008
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same
ASML NETHERLANDS BV9 citations76
US7439531B2Oct 21, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV7 citations71