Inventor
SCHETS SICCO IAN
NL9 patents
⚠️ This page may combine multiple inventors who share the name “SCHETS SICCO IAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7880880B2Feb 1, 2011
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV24 citations95
US7332732B2Feb 19, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV22 citations94
US7329888B2Feb 12, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV18 citations91
US7297971B2Nov 20, 2007
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV12 citations91
US7565219B2Jul 21, 2009
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations81
US7439531B2Oct 21, 2008
Alignment systems and methods for lithographic systems
ASML NETHERLANDS BV7 citations71
US7558643B2Jul 7, 2009
Lithographic apparatus, method of determining a model parameter, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations60
US7288779B2Oct 30, 2007
Method for position determination, method for overlay optimization, and lithographic projection apparatus
ASML NETHERLANDS BV4 citations54