Inventor

EDART REMI DANIEL MARIE

NL8 patents

⚠️ This page may combine multiple inventors who share the name “EDART REMI DANIEL MARIE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

5 patents

US7126669B2Oct 24, 2006

Method and system for automated process correction using model parameters, and lithographic apparatus using such method and system

ASML NETHERLANDS BV20 citations90

US7259828B2Aug 21, 2007

Alignment system and method and device manufactured thereby

ASML NETHERLANDS BV25 citations86

US9291916B2Mar 22, 2016

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

ASML NETHERLANDS BV5 citations83

US9454084B2Sep 27, 2016

Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system

ASML NETHERLANDS BV5 citations72

US7317509B2Jan 8, 2008

Method and system for automated process correction using model parameters, and lithographic apparatus using such method and system

ASML NETHERLANDS BV3 citations60

VAN DER SANDEN STEFAN CORNELIS THEODORUS

1 patent

US8976355B2Mar 10, 2015

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

VAN DER SANDEN STEFAN CORNELIS THEODORUS19 citations88

ASML NETHERLANDS N V

1 patent

US8982347B2Mar 17, 2015

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus

ASML NETHERLANDS N V8 citations78

BEST KEITH FRANK

1 patent

US8576374B2Nov 5, 2013

Lithographic apparatus and method

BEST KEITH FRANK3 citations54