P

Inventor

WEI XIUHONG

NL7 patents
⚠️ This page may combine multiple inventors who share the name “WEI XIUHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

4 patents
US9291916B2Mar 22, 2016

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

ASML NETHERLANDS BV5 citations83
US12306545B2May 20, 2025

Determining lithographic matching performance

ASML NETHERLANDS BV0 citations59
US11061336B2Jul 13, 2021

Device manufacturing method

ASML NETHERLANDS BV1 citations58
US11669017B2Jun 6, 2023

Method for controlling a manufacturing apparatus and associated apparatuses

ASML NETHERLANDS BV1 citations57

VAN DER SANDEN STEFAN CORNELIS THEODORUS

1 patent
US8976355B2Mar 10, 2015

Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods

VAN DER SANDEN STEFAN CORNELIS THEODORUS19 citations88

MUSA SAMI

1 patent
US8072615B2Dec 6, 2011

Alignment method, alignment system, and product with alignment mark

MUSA SAMI11 citations80

ASML NETHERLANDS N V

1 patent
US8982347B2Mar 17, 2015

Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus

ASML NETHERLANDS N V8 citations78