Inventor
BEHERA SWAYAMBHU P
US3 patents
Patents
3 patentsUS9721784B2Aug 1, 2017
Ultra-conformal carbon film deposition
APPLIED MATERIALS INC29 citations93
US10403535B2Sep 3, 2019
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system
APPLIED MATERIALS INC11 citations83
US10074534B2Sep 11, 2018
Ultra-conformal carbon film deposition
APPLIED MATERIALS INC5 citations71