Inventor

SUMMAN TERSEM

US4 patents

⚠️ This page may combine multiple inventors who share the name “SUMMAN TERSEM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US9721784B2Aug 1, 2017

Ultra-conformal carbon film deposition

APPLIED MATERIALS INC29 citations93

US10074534B2Sep 11, 2018

Ultra-conformal carbon film deposition

APPLIED MATERIALS INC5 citations71

REILLY PATRICK

1 patent

US8679987B2Mar 25, 2014

Deposition of an amorphous carbon layer with high film density and high etch selectivity

REILLY PATRICK7 citations79

ZHOU JIANHUA

1 patent

US8097082B2Jan 17, 2012

Nonplanar faceplate for a plasma processing chamber

ZHOU JIANHUA4 citations59