Inventor
PIRKLE DAVID
US3 patents
Patents
3 patentsUS5234526AAug 10, 1993
Window for microwave plasma processing device
LAM RES CORP449 citations98
US7334477B1Feb 26, 2008
Apparatus and methods for the detection of an arc in a plasma processing system
LAM RES CORP50 citations89
US7722778B2May 25, 2010
Methods and apparatus for sensing unconfinement in a plasma processing chamber
LAM RES CORP18 citations82