Inventor
MALLICK ABHIJIT
US3 patents
Patents
3 patentsUS9018108B2Apr 28, 2015
Low shrinkage dielectric films
APPLIED MATERIALS INC6 citations71
US11227797B2Jan 18, 2022
Film deposition using enhanced diffusion process
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US11276573B2Mar 15, 2022
Methods of forming high boron-content hard mask materials
APPLIED MATERIALS INC0 citations58